| 000 | 00859nas a2200253 i 4500 | ||
|---|---|---|---|
| 001 | 24988 | ||
| 005 | 20170214084401.0 | ||
| 011 |
_a0894-6507 _dcompra |
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| 090 | _a24988 | ||
| 100 | _a20060705 1988 k pory50 | ||
| 101 | 0 | _aeng | |
| 106 | _ar | ||
| 110 | _aaha | ||
| 200 | 1 |
_aIEEE transactions on semiconductor manufacturing _fpropr. Institute of Electrical and Electronics Engineers |
|
| 210 |
_aNew York _cIEEE _d1988 |
||
| 303 | _aDescrição baseada em: vol. 1, nº 2 (May 1988) | ||
| 326 | _aTrimestral | ||
| 500 | 1 | 1 | _aIEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING. Nova Iorque, 1988 |
| 606 |
_910487 _aFabricação mecânica |
||
| 675 | _a621.7 | ||
| 712 | 0 | 2 |
_aINSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS _92457 |
| 852 |
_aISEL _bBiblioteca Central |
||
| 856 |
_uhttp://ieeexplore.ieee.org/servlet/opac?punumber=66 _zAcesso online |
||
| 942 | _cPP | ||