000 00729nam a2200217 i 4500
001 24013
005 20170214082233.0
010 _a978-3-540-34613-5
090 _a24013
100 _a20090127d2007 0pory50 ba
200 1 _aFast simulation of electro-thermal MEMS
_bDocumento electrónico
_e efficient dynamic compact models
_fT. Bechtold, E. Rudnyi, J. G. Korvink
210 _aBerlin
_cSpringer
_d2007
215 _aE-book
225 1 _aMicrotechnology and MEMS
300 _aAcesso ao documento electrónico no ISEL
606 _910390
_aEngenharia
675 _a62
700 1 _aBECHTOLD
_bT.
_911923
852 _aISEL
_bBiblioteca Central
856 _uhttp://www.springerlink.com/content/g02102/
_zAcesso online
942 _cEBO