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Fast simulation of electro-thermal MEMS [Documento electrónico] : efficient dynamic compact models / T. Bechtold, E. Rudnyi, J. G. Korvink

Main Author: BECHTOLD, T.Publication: Berlin : Springer, 2007Description: E-bookISBN: 978-3-540-34613-5.Series: Microtechnology and MEMSSubject - Topical Name: Engenharia Online Resources:Acesso online
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