Handbook of microlithography, micromachining, and microfabrication vol. 2 : micromachining and microfabrication / P. Rai-Choudhury
Publication: Bellingham : The Society of Photo-Optical Instrumentation Engineers, 1997Description: VIII, 692 p. : il. ; 26 cmISBN: 0-85296-911-2.Series: IEE Materials and Devices Series, 12BSubject - Topical Name: Fabricação mecânica | Microelectrónica | Microsensores | Circuitos ópticos| Item type | Current location | Call number | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|
| Livro | Biblioteca do ISEL | RAI 621.7 (Browse shelf) | Available | 1009752 |
Total holds: 0
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