Handbook of microlithography, micromachining, and microfabrication vol. 1 : microlithography / P. Rai-Choudhury
Publication: London : The Society of Photo-Optical Instrumentation Engineers, 1997Description: VIII, 768 p. : il ; 26 cmISBN: 0-85296-906-6.Series: IEE Materials and Device Series, 12Subject - Topical Name: Fabricação mecânica | Litografia óptica | Fotolitografia | Circuitos microelétricos| Item type | Current location | Call number | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|
| Livro | Biblioteca do ISEL | RAI 621.7 (Browse shelf) | Available | 1009751 |
Total holds: 0
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