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Micro mechanical systems : principles and technology / T. Fukuda, W. Menz

Main Author: FUKUDA, T.Publication: Amsterdam : Elsevier, 1998Description: VIII, 268 p. : il. ; 25 cmISBN: 0-444-82363-8.Series: Handbook of Sensors and Actuators, 6Subject - Topical Name: Engenharia de controlo automático | Microelectromecânica | Máquinas ferramentas | Microsistema
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Item type Current location Call number Status Date due Barcode Item holds
Livro Interdito Biblioteca do ISEL FUK. 681.5 (Browse shelf) Not for loan 1005807
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